Fabrication of Periodic Metal Nanodots Arrays
نویسندگان
چکیده
INTRODUCTION Recently, fabrication of nanodots structure of various materials has attracted intense scientific interests because of their great potentials for wide technological applications. Metal nanoscale dots that exhibit unique properties based on their nano size effects are expected to be the building blocks of new functional nanodevices, such as catalysis, environmental remediation, DNA detection, high density data storage, and electronic and optical devices. Periodic nanodots arrays are required in some of these applications that demand low-cost nanopatterning technologies for gaining a competitive edge. Lithography tools such as electron beam lithography (EBL) and focused ion beam (FIB) allow well defined and well positioned nanodots, but they are limited by low throughput and small areas, which are not suitable for mass production when a large area of nanodots arrays is required.
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